Optical inspection of Microsystems W Osten, A Duparre, C Furlong, I De Wolf, A Asundi, K Korner, D Vogel, ... CRC press, 2018 | 249 | 2018 |
Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks M Hasegawa, RK Chutani, C Gorecki, R Boudot, P Dziuban, V Giordano, ... Sensors and Actuators A: Physical 167 (2), 594-601, 2011 | 143 | 2011 |
Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques J Albero, L Nieradko, C Gorecki, H Ottevaere, V Gomez, H Thienpont, ... Optics express 17 (8), 6283-6292, 2009 | 137 | 2009 |
AlN as an actuation material for MEMS applications: The case of AlN driven multilayered cantilevers A Andrei, K Krupa, M Jozwik, P Delobelle, L Hirsinger, C Gorecki, ... Sensors and Actuators A: Physical 141 (2), 565-576, 2008 | 100 | 2008 |
Coherent-population-trapping resonances in buffer-gas-filled Cs-vapor cells with push-pull optical pumping X Liu, JM Mérolla, S Guérandel, C Gorecki, E de Clercq, R Boudot Physical Review A—Atomic, Molecular, and Optical Physics 87 (1), 013416, 2013 | 87 | 2013 |
Vapour microcell for chip scale atomic frequency standard A Douahi, L Nieradko, JC Beugnot, J Dziuban, H Maillote, S Guérandel, ... Electronics Letters 43 (5), 1, 2007 | 80 | 2007 |
AC Stark-shift in CPT-based Cs miniature atomic clocks D Miletic, C Affolderbach, M Hasegawa, R Boudot, C Gorecki, G Mileti Applied Physics B 109, 89-97, 2012 | 77 | 2012 |
Effects of amplitude and phase mismatching errors in the generation of a kinoform for pattern recognition I Moreno, J Campos, C Gorecki, MJYMJ Yzuel Japanese journal of applied physics 34 (12R), 6423, 1995 | 77 | 1995 |
Coherent population trapping resonances in Cs–Ne vapor microcells for miniature clocks applications R Boudot, P Dziuban, M Hasegawa, RK Chutani, S Galliou, V Giordano, ... Journal of Applied Physics 109 (1), 2011 | 75 | 2011 |
Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques LA Salbut, K Patorski, M Jozwik, JM Kacperski, C Gorecki, A Jacobelli, ... Microsystems Engineering: Metrology and Inspection III 5145, 23-32, 2003 | 74 | 2003 |
Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench S Bargiel, K Rabenorosoa, C Clevy, C Gorecki, P Lutz Journal of Micromechanics and Microengineering 20 (4), 045012, 2010 | 70 | 2010 |
Silicon-based integrated interferometer with phase modulation driven by surface acoustic waves C Gorecki, F Chollet, E Bonnotte, H Kawakatsu Optics letters 22 (23), 1784-1786, 1997 | 66 | 1997 |
A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications K Laszczyk, S Bargiel, C Gorecki, J Krężel, P Dziuban, M Kujawińska, ... Sensors and Actuators A: Physical 163 (1), 255-265, 2010 | 58 | 2010 |
New approach of fabrication and dispensing of micromachined cesium vapor cell L Nieradko, C Gorecki, A Douahi, V Giordano, JC Beugnot, J Dziuban, ... Journal of Micro/Nanolithography, MEMS and MOEMS 7 (3), 033013-033013-6, 2008 | 58 | 2008 |
Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation QAA Tanguy, O Gaiffe, N Passilly, JM Cote, G Cabodevila, S Bargiel, ... Optics Express 28 (6), 8512-8527, 2020 | 56 | 2020 |
Optomechanical characterisation of compressively prestressed silicon oxynitride films deposited by plasma-enhanced chemical vapour deposition on silicon membranes M Józwik, P Delobelle, C Gorecki, A Sabac, L Nieradko, C Meunier, ... Thin Solid Films 468 (1-2), 84-92, 2004 | 56 | 2004 |
Micromachined array-type Mirau interferometer for parallel inspection of MEMS J Albero, S Bargiel, N Passilly, P Dannberg, M Stumpf, UD Zeitner, ... Journal of Micromechanics and Microengineering 21 (6), 065005, 2011 | 55 | 2011 |
Demonstration of the mass-producible feature of a Cs vapor microcell technology for miniature atomic clocks R Vicarini, V Maurice, MA Hafiz, J Rutkowski, C Gorecki, N Passilly, ... Sensors and Actuators A: Physical 280, 99-106, 2018 | 50 | 2018 |
Optimization of plasma-deposited silicon oxinitride films for optical channel waveguides C Gorecki Optics and Lasers in Engineering 33 (1), 15-20, 2000 | 50 | 2000 |
Interferogram analysis using a Fourier transform method for automatic 3D surface measurement C Gorecki Pure and Applied Optics: Journal of the European Optical Society Part A 1 (2 …, 1992 | 50 | 1992 |