Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ... IEEE electron device letters 29 (2), 146-148, 2008 | 159 | 2008 |
Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ... Journal of Micromechanics and Microengineering 19 (1), 015002, 2008 | 109 | 2008 |
CMOS–MEMS resonators: From devices to applications A Uranga, J Verd, N Barniol Microelectronic Engineering 132, 58-73, 2015 | 106 | 2015 |
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ... Journal of microelectromechanical systems 14 (3), 508-519, 2005 | 101 | 2005 |
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ... IEEE Electron Device Letters 27 (6), 495-497, 2006 | 93 | 2006 |
A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High-22-MHz Polysilicon Clamped-Clamped Beam Resonators JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ... IEEE Electron Device Letters 30 (7), 718-720, 2009 | 86 | 2009 |
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ... Applied physics letters 91 (1), 2007 | 85 | 2007 |
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol Sensors and Actuators A: Physical 197, 88-95, 2013 | 73 | 2013 |
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ... Sensors and Actuators A: Physical 132 (1), 154-164, 2006 | 66 | 2006 |
Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ... Applied physics letters 89 (3), 2006 | 64 | 2006 |
Integrated CMOS amplifier for ENG signal recording A Uranga, X Navarro, N Barniol IEEE Transactions on biomedical engineering 51 (12), 2188-2194, 2004 | 45 | 2004 |
Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects H Campanella, A Uranga, A Romano-Rodríguez, J Montserrat, G Abadal, ... Sensors and Actuators A: Physical 142 (1), 322-328, 2008 | 41 | 2008 |
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ... Small 5 (2), 176-180, 2009 | 40 | 2009 |
Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications I Zamora, E Ledesma, A Uranga, N Barniol IEEE Access 8, 142785-142794, 2020 | 39 | 2020 |
Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator A Uranga, J Verd, JL Lopez, J Teva, G Abadal, F Torres, J Esteve, ... Electronics Letters 43 (8), 452-454, 2007 | 39 | 2007 |
Miniaturized 0.13-μm CMOS front-end analog for AlN PMUT arrays I Zamora, E Ledesma, A Uranga, N Barniol Sensors 20 (4), 1205, 2020 | 37 | 2020 |
A 3V CMOS-MEMS oscillator in 0.35 μm CMOS technology J Verd, A Uranga, J Segura, N Barniol 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 37 | 2013 |
From VHF to UHF CMOS-MEMS monolithically integrated resonators J Teva, G Abadal, A Uranga, J Verd, F Torres, JL López, J Esteve, ... 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008 | 37 | 2008 |
Integration of NEMS resonators in a 65 nm CMOS technology JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ... Microelectronic Engineering 110, 246-249, 2013 | 36 | 2013 |
Tent-plate AlN PMUT with a piston-like shape under liquid operation E Ledesma, I Zamora, A Uranga, N Barniol IEEE Sensors Journal 20 (19), 11128-11137, 2020 | 30 | 2020 |